Preparation of Silcon Nanoparticles and Films By Pulsed Laser Deposition


Silicon films and nanoparticles were prepared by pulsed laser deposition under irradiation of crystalline silicon targets in residual inert gas atmosphere. Properties the prepared samples were investigated by means of the scanning probe microscopy.

Keywords: pulsed laser deposition, scanning probe microscopy, silicon film, nanoparticles.

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